PFC is one of the 6 Global Warming Gases (GWG) identified by the UNFCCC that contributes to the total carbon emission into the atmosphere
Steam Plasma Scrubber – >99% DRE on PFC gases (>95% for CF4)
– Etch, Thin Film (CVD/PVD), Diffusion Modules
– Gas flow of 300 to 600 slm
– SEMI-S2 Compliance
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