PFC Gas Abatement System

PFC is one of the 6 Global Warming Gases (GWG) identified by the UNFCCC that contributes to the total carbon emission into the atmosphere

Steam Plasma Scrubber – >99% DRE on PFC gases (>95% for CF4)

– Etch, Thin Film (CVD/PVD), Diffusion Modules

– Gas flow of 300 to 600 slm

– SEMI-S2 Compliance

Please contact us at so that we can assess your air pollution problem and make recommendations accordingly.